Sensor Die With A Diaphragm

A sensor die includes a diaphragm having a first membrane and a second membrane positioned within the first membrane. The first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side. The sec...

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Bibliographic Details
Main Authors Fong, Jeffrey C, O'Brien, Daniel T
Format Patent
LanguageEnglish
Published 22.08.2024
Subjects
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Summary:A sensor die includes a diaphragm having a first membrane and a second membrane positioned within the first membrane. The first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side. The second membrane is deflectable simultaneously with the first membrane in proportion with an absolute pressure on the first side of the diaphragm.
Bibliography:Application Number: US202318169939