COMPOSITION AND METHOD FOR TREATING OBJECT TO BE TREATED

An object of the present invention is to provide a composition having excellent ruthenium removability with respect to tungsten in a case of being applied to an object to be treated containing tungsten and ruthenium. The composition according to an embodiment of the present invention includes: perio...

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Bibliographic Details
Main Authors MIZUTANI, Atsushi, NARITA, Moe
Format Patent
LanguageEnglish
Published 22.08.2024
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Summary:An object of the present invention is to provide a composition having excellent ruthenium removability with respect to tungsten in a case of being applied to an object to be treated containing tungsten and ruthenium. The composition according to an embodiment of the present invention includes: periodic acid or a salt thereof, a quaternary ammonium salt; a resin containing a nitrogen atom; and a solvent.
Bibliography:Application Number: US202418609739