COMPOSITION AND METHOD FOR TREATING OBJECT TO BE TREATED
An object of the present invention is to provide a composition having excellent ruthenium removability with respect to tungsten in a case of being applied to an object to be treated containing tungsten and ruthenium. The composition according to an embodiment of the present invention includes: perio...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
22.08.2024
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Subjects | |
Online Access | Get full text |
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Summary: | An object of the present invention is to provide a composition having excellent ruthenium removability with respect to tungsten in a case of being applied to an object to be treated containing tungsten and ruthenium. The composition according to an embodiment of the present invention includes: periodic acid or a salt thereof, a quaternary ammonium salt; a resin containing a nitrogen atom; and a solvent. |
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Bibliography: | Application Number: US202418609739 |