METHOD AND APPARATUS FOR MANUFACTURING DISPLAY DEVICE

• Main Authors: PARK, Joonyong, JEONG, Samtae, LEE, Juhyun, AHN, Yijoon, SHIN, Hyuneok, KWON, Sungjoo, LEE, Changhee, CHUNG, Yungbin
• Format: Patent
• Language: English
• Published: 15.08.2024
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

An apparatus for manufacturing a display device includes a stage on which a display substrate is arranged, a nozzle portion facing the stage, where the nozzle portion supplies gas to the display substrate to form at least one selected from a base portion and a graphene layer on the display substrate, and a driver connected to at least one of the nozzle portion and the stage, where the driver linearly moves at least one selected from the nozzle portion and the stage in a predetermined direction. The nozzle portion forms the at least one selected from the base portion and the graphene layer on the display substrate based on a relative motion thereof with the stage.