EXPOSURE METHOD, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING OPTICALLY-ANISOTROPIC LAYER

Provided is an exposure method and an exposure device for obtaining a photo-alignment film where the accuracy of an alignment pattern is high, and a method of manufacturing an optically-anisotropic layer. Provided is an exposure method in which linearly polarized light is focused in a ring shape wit...

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Bibliographic Details
Main Authors HARASAWA, Takehiko, SEKIZAWA, Yasuhiro, ANDO, Hirotoshi, NAGANO, Satoshi
Format Patent
LanguageEnglish
Published 25.07.2024
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Summary:Provided is an exposure method and an exposure device for obtaining a photo-alignment film where the accuracy of an alignment pattern is high, and a method of manufacturing an optically-anisotropic layer. Provided is an exposure method in which linearly polarized light is focused in a ring shape with an optical member to expose a film including a compound having a photo-aligned group, the method including: an exposure step of relatively moving the film and the optical member in an optical axis direction of the optical member while rotating a polarization direction of the linearly polarized light.
Bibliography:Application Number: US202418628911