Component for Manufacturing Micro- and/or Nanostructured Devices and Method of Manufacturing the Same

Disclosed is a component for manufacturing micro- and/or nanostructured devices. The component has a base body and a surface which has micro- or nanostructures which form a substantially flat support surface, and between which trenches extend with a statistical distribution, to which a vacuum can be...

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Bibliographic Details
Main Authors VOGLER, Uwe, SARCLETTI, Marco
Format Patent
LanguageEnglish
Published 11.07.2024
Subjects
MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES
MICROSTRUCTURAL TECHNOLOGY
NANOTECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
TRANSPORTING
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Summary:Disclosed is a component for manufacturing micro- and/or nanostructured devices. The component has a base body and a surface which has micro- or nanostructures which form a substantially flat support surface, and between which trenches extend with a statistical distribution, to which a vacuum can be applied. Also disclosed is a method of manufacturing such a component.
Bibliography:Application Number: US202418410339