ANNULAR AIRFLOW REGULATING APPARATUS AND METHOD

An annular airflow regulating apparatus includes a cup-shaped element and an adjustment element. The cup-shaped element has a bowl and a bottom, integrated to form a first chamber. The bottom has a tapered channel parallel to an axis and penetrating through the bottom. A ring-shaped groove is dispos...

Full description

Saved in:
Bibliographic Details
Main Authors Tsai, Ming-Hau, chao, Ko-Chieh, Chen, Chang-Yi, Lin, Yi-Wei, DU, CHENUNG, Chang, Ming-Jyh
Format Patent
LanguageEnglish
Published 11.07.2024
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:An annular airflow regulating apparatus includes a cup-shaped element and an adjustment element. The cup-shaped element has a bowl and a bottom, integrated to form a first chamber. The bottom has a tapered channel parallel to an axis and penetrating through the bottom. A ring-shaped groove is disposed between the tapered channel and the bottom. The ring-shaped groove has an annular plane perpendicular to the axis. The adjustment element, having a tapered portion and second holes, is movably disposed in the cup-shaped element. The tapered portion protrudes into the tapered channel A tapered annular gap is formed between the tapered portion and the tapered channel. When the adjustment element is moved with respect to the cup-shaped element, a width of the tapered annular gap is varied, and thereupon a flow rate and velocity of the process gas would be varied accordingly.
Bibliography:Application Number: US202218063428