ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF

• Main Authors: CHUNG, TEN, ZHENG, HUILONG, WANG, XINGANG
• Format: Patent
• Language: English
• Published: 04.07.2024
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

An array substrate and a manufacturing method thereof are provided. The array substrate includes: a substrate; a data line and a first insulation layer which are provided on the substrate; a metal oxide semiconductor layer provided above the first insulation layer, the metal oxide semiconductor layer including a source and a drain which are conductors and an active layer which is a semiconductor; a gate insulation layer provided on the metal oxide semiconductor layer, and a scan line and a gate provided on the gate insulation layer, the projection of the active layer on the substrate coinciding with an overlapping area of the projection of the scan line and the projection of the data line on the substrate, the projection of the gate on the substrate coinciding with the projection of the active layer on the substrate; and a pixel electrode provided above the first insulating layer.