SUBSTRATE CONTAINER WITH PURGE GAS DIFFUSER

Described are wafer containers adapted to store or transport semiconductor wafers in a clean environment, including containers that include a purge gas delivery device, as well as methods for purging the environment within the container.

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Bibliographic Details
Main Authors Harr, Colton J, Eggum, Shawn D, Yakuba, Aleksandr, Fuller, Matthew A, Wilkie, Thomas H, Smith, Mark V
Format Patent
LanguageEnglish
Published 04.07.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Described are wafer containers adapted to store or transport semiconductor wafers in a clean environment, including containers that include a purge gas delivery device, as well as methods for purging the environment within the container.
Bibliography:Application Number: US202318398065