OPTICAL SCANNING DEVICE

The optical scanning device includes: a micromirror device including a mirror portion that has a reflecting surface for reflecting incident light, a first actuator that allows the mirror portion to swing around a first axis parallel to the reflecting surface in a case where the mirror portion is sta...

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Bibliographic Details
Main Authors NAKABAYASHI, Koki, NISHIURA, Yosuke
Format Patent
LanguageEnglish
Published 04.07.2024
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:The optical scanning device includes: a micromirror device including a mirror portion that has a reflecting surface for reflecting incident light, a first actuator that allows the mirror portion to swing around a first axis parallel to the reflecting surface in a case where the mirror portion is stationary, and a second actuator that allows the mirror portion to swing around a second axis parallel to the reflecting surface and orthogonal to the first axis; a light source that emits a light beam; a light deflector that deflects the light beam emitted from the light source; an optical system that guides the light beam deflected by the light deflector to a back surface of the mirror portion, which is a surface opposite to the reflecting surface; and a position detector that detects a position of the light beam deflected by the back surface.
Bibliography:Application Number: US202418603808