ANTIFUSE DEVICES AND METHODS OF MAKING THEREOF

An antifuse device has a first contact structure and a second contact structure in a substrate. The first contact structure has a first contact side adjoining a second contact side and forming a first contact corner having an acute angle. The second contact structure is spaced from and not electrica...

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Bibliographic Details
Main Authors TAN, JUAN BOON, BALAN, HARI, SUN, JIANXUN, LEE, SHU HUI, MAUNG, MYO AUNG
Format Patent
LanguageEnglish
Published 20.06.2024
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Summary:An antifuse device has a first contact structure and a second contact structure in a substrate. The first contact structure has a first contact side adjoining a second contact side and forming a first contact corner having an acute angle. The second contact structure is spaced from and not electrically connected to the first contact structure. The antifuse device further includes a first dummy structure in the substrate, adjacent to the first contact structure. The first dummy structure has a first dummy side nearest to and spaced from the first contact side of the first contact structure.
Bibliography:Application Number: US202218065632