ANTIFUSE DEVICES AND METHODS OF MAKING THEREOF
An antifuse device has a first contact structure and a second contact structure in a substrate. The first contact structure has a first contact side adjoining a second contact side and forming a first contact corner having an acute angle. The second contact structure is spaced from and not electrica...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
20.06.2024
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Subjects | |
Online Access | Get full text |
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Summary: | An antifuse device has a first contact structure and a second contact structure in a substrate. The first contact structure has a first contact side adjoining a second contact side and forming a first contact corner having an acute angle. The second contact structure is spaced from and not electrically connected to the first contact structure. The antifuse device further includes a first dummy structure in the substrate, adjacent to the first contact structure. The first dummy structure has a first dummy side nearest to and spaced from the first contact side of the first contact structure. |
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Bibliography: | Application Number: US202218065632 |