CONTROL OF DISSOLVED GAS CONCENTRATION IN ELECTROPLATING BATHS

A concentration of a dissolved gas can be controlled by following an electroplating solution through a contactor, controlling a pressure within the contactor, and thereby maintaining the concentration of the dissolved gas in the electroplating solution within a first concentration range. The first c...

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Bibliographic Details
Main Authors Rash, Robert, Venkatraman, Kailash, Chua, Lee Peng, Blickensderfer, Jacob Kurtis, Wilmot, Frederick Dean, Kearns, Gregory J
Format Patent
LanguageEnglish
Published 20.06.2024
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Summary:A concentration of a dissolved gas can be controlled by following an electroplating solution through a contactor, controlling a pressure within the contactor, and thereby maintaining the concentration of the dissolved gas in the electroplating solution within a first concentration range. The first concentration range is non-zero and sub-saturation.
Bibliography:Application Number: US202218554622