TRANSFER MODULE AND TRANSFER METHOD

• Main Authors: KITA, Masatomo, TOYOMAKI, Toshiaki, AMIKURA, Norihiko, KAISE, Seiichi, SAEGUSA, Makoto
• Format: Patent
• Language: English
• Published: 06.06.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present disclosure provides a transfer module, comprising: a first transfer chamber; a second transfer chamber, the second transfer chamber capable of accommodating a container accommodating a plurality of objects; and an opening/closing door configured to partition the first transfer chamber an...