PLASMA PROCESSING APPARATUS, PLASMA STATE DETECTION METHOD, AND PLASMA STATE DETECTION PROGRAM

A measurement part controls power supplied to a heater such that a temperature of the heater becomes constant by using a heater controller, and measures the supplied power in an unignited state in which plasma is not ignited and a transient state in which the power supplied to the heater decreases a...

Full description

Saved in:
Bibliographic Details
Main Authors OKA, Shinsuke, HAYASHI, Daisuke, UMEZAWA, Yoshihiro
Format Patent
LanguageEnglish
Published 06.06.2024
Subjects
ALARM SYSTEMS
BASIC ELECTRIC ELEMENTS
CONTROLLING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ORDER TELEGRAPHS
PHYSICS
REGULATING
SIGNALLING
SIGNALLING OR CALLING SYSTEMS
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
Online AccessGet full text

Cover

More Information
Summary:A measurement part controls power supplied to a heater such that a temperature of the heater becomes constant by using a heater controller, and measures the supplied power in an unignited state in which plasma is not ignited and a transient state in which the power supplied to the heater decreases after plasma is ignited. A parameter calculator performs fitting on a calculation model, which includes a heat input amount from the plasma as a parameter, for calculating the power supplied in the transient state by using the power supplied in the unignited state and the transient state and measured by the measurement part, and calculates the heat input amount. An output part configured to output information based on the heat input amount calculated by the parameter calculator
Bibliography:Application Number: US202418442022