STAIRLESS THREE-DIMENSIONAL MEMORY DEVICE AND METHOD OF MAKING THEREOF BY FORMING REPLACEMENT WORD LINES THROUGH MEMORY OPENINGS

A memory device includes an alternating stack of insulating layers and composite layers, where each of the composite layers contains an electrically conductive layer and a dielectric material plate, memory openings vertically extending through the alternating stack, memory opening fill structures lo...

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Bibliographic Details
Main Authors IWAI, Takaaki, MAEKURA, Takayuki, IZUMI, Keisuke
Format Patent
LanguageEnglish
Published 30.05.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INFORMATION STORAGE
PHYSICS
SEMICONDUCTOR DEVICES
STATIC STORES
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Summary:A memory device includes an alternating stack of insulating layers and composite layers, where each of the composite layers contains an electrically conductive layer and a dielectric material plate, memory openings vertically extending through the alternating stack, memory opening fill structures located in the memory openings, where each of the memory opening fill structures includes a respective vertical stack of memory elements and a vertical semiconductor channel and a plurality of integrated line-and-via structures. Each of the plurality of integrated line-and-via structures includes a conductive plate portion that contacts the electrically conductive layer of a respective one of the composite layers, and a conductive via portion that is adjoined to a top surface of the conductive plate portion and vertically extends through a respective overlying subset of the insulating layers and a subset of the dielectric material plates of the composite layers.
Bibliography:Application Number: US202318349578