Pixel Scale Guided Mode Resonant Filter For Hyperspectral Sensing

Sensors and systems are provided. A sensor as disclosed includes a plurality of pixels disposed within an array. Each pixel is associated with a hyperspectral filter including a metamaterial and a metal grating capable of passing light of a particular wavelength range through to an image sensor. Sys...

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Bibliographic Details
Main Authors O'Loughlin, Trevor, Gui, Gui, Brady, Frederick T, Han, Sungin, Lenchenkov, Victor A
Format Patent
LanguageEnglish
Published 30.05.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:Sensors and systems are provided. A sensor as disclosed includes a plurality of pixels disposed within an array. Each pixel is associated with a hyperspectral filter including a metamaterial and a metal grating capable of passing light of a particular wavelength range through to an image sensor. Systems include the use of an aluminum grating separated from a metamaterial including TiO2 and Si3N4 by a SiO2 coupling layer as a filter mounted on a substrate.
Bibliography:Application Number: US202218060275