MICROBOLOMETER SYSTEMS AND METHODS

Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the mi...

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Bibliographic Details
Main Authors Dale, James L, Cannata, Robert F, Kurth, Eric A, Sigurdson, Marin, Chan, Christopher
Format Patent
LanguageEnglish
Published 16.05.2024
Subjects
BASIC ELECTRIC ELEMENTS
COLORIMETRY
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
PICTORIAL COMMUNICATION, e.g. TELEVISION
RADIATION PYROMETRY
SEMICONDUCTOR DEVICES
TESTING
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Summary:Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the microbolometer array includes a second having a first dimension that extends in a first direction substantially parallel to the plane and a second dimension that extends in a second direction away from the plane. The first dimension is less than the second dimension. The segment includes a metal layer and a layer formed on a side of the metal layer.
Bibliography:Application Number: US202318514743