SEMICONDUCTOR DEVICE FOR MEASURING HYDROGEN AND METHOD FOR MEASURING A HYDROGEN CONCENTRATION IN A MEDIUM BY MEANS OF SUCH A SEMICONDUCTOR DEVICE

The application relates to a semiconductor device for measuring hydrogen including a sensor chip having a sensor layer, which changes its mechanical stress upon contact with hydrogen. The sensor chip furthermore has a sensor for detecting the change in stress, wherein the construction of the semicon...

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Bibliographic Details
Main Authors THEUSS, Horst, SCHALLER, Rainer Markus
Format Patent
LanguageEnglish
Published 09.05.2024
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:The application relates to a semiconductor device for measuring hydrogen including a sensor chip having a sensor layer, which changes its mechanical stress upon contact with hydrogen. The sensor chip furthermore has a sensor for detecting the change in stress, wherein the construction of the semiconductor device affords the sensor layer and/or the sensor protection against further mechanical stresses. The application furthermore relates to a method for measuring a hydrogen concentration.
Bibliography:Application Number: US202318496428