METHOD FOR MANUFACTURING SUPERCONDUCTING FILMS, SUPERCONDUCTING FILM, QUANTUM DEVICE, AND QUANTUM CHIP
A method for manufacturing superconducting films. The method includes: heating a first atmosphere environment where a first superconducting film is located from a first temperature to a second temperature, so that the first superconducting film is in a second atmosphere environment, the first superc...
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Main Author | |
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Format | Patent |
Language | English |
Published |
02.05.2024
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Subjects | |
Online Access | Get full text |
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Summary: | A method for manufacturing superconducting films. The method includes: heating a first atmosphere environment where a first superconducting film is located from a first temperature to a second temperature, so that the first superconducting film is in a second atmosphere environment, the first superconducting film being a superconducting material deposited on a substrate; continuously introducing hydrogen atoms into the second atmosphere environment and maintaining for a predetermined duration after the second atmosphere environment reaches the second temperature, so that the first superconducting film is in a third atmosphere environment and micro-scale crystal structure defects of the first superconducting film are filled with the hydrogen atoms, the second temperature being configured to maintain a free state of the hydrogen atoms; and cooling the third atmosphere environment from the second temperature to a third temperature less than the first temperature after the predetermined duration to manufacture a second superconducting film. |
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Bibliography: | Application Number: US202318482351 |