LOAD PORT

A load port includes: a plate-shaped base member having an opening via which a transfer target object is loaded and unloaded; a door member capable of opening and closing the opening; a link mechanism including a link member having one end rotatably connected to the door member; a guide roller confi...

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Bibliographic Details
Main Authors Suzuki, Atsushi, Ishihara, Yuki, Kogiso, Shinpei, Ogawa, Tatsuru, Matsumoto, Yuki, Miura, Tatsuya
Format Patent
LanguageEnglish
Published 02.05.2024
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Summary:A load port includes: a plate-shaped base member having an opening via which a transfer target object is loaded and unloaded; a door member capable of opening and closing the opening; a link mechanism including a link member having one end rotatably connected to the door member; a guide roller configured to move together with the door member; a guide surface bent to extend from a first direction to a second direction and configured to guide the guide roller; a drive member to which the other end of the link member is rotatably connected; and a driver configured to move the drive member in the second direction.
Bibliography:Application Number: US202318383938