CASSETTE STRUCTURES AND RELATED METHODS FOR BATCH PROCESSING IN EPITAXIAL DEPOSITION OPERATIONS
A cassette support system is disclosed and includes a pedestal assembly, with a shaft, a plurality of arms coupled to the shaft and extending radially from the shaft, wherein at least two radially adjacent arms included in the plurality of arms are separated by an angle of about 130 degrees or great...
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Main Author | |
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Format | Patent |
Language | English |
Published |
02.05.2024
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Subjects | |
Online Access | Get full text |
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Summary: | A cassette support system is disclosed and includes a pedestal assembly, with a shaft, a plurality of arms coupled to the shaft and extending radially from the shaft, wherein at least two radially adjacent arms included in the plurality of arms are separated by an angle of about 130 degrees or greater, a plurality of cassette supporting arms, with each cassette supporting arm extending from an end of an arm included in the plurality of arms, and one or more substrate support rings, wherein each substrate support ring includes a ridge defined along an inner circumference of the substrate support ring where the ridge configured to receive a substrate. |
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Bibliography: | Application Number: US202318382114 |