ELECTRON MICROSCOPE

An object of the invention is to provide an electron microscope capable of obtaining a sufficient energy resolution without forming a long drift space and capable of attaining high energy discrimination detection performance with approximately the same device size as in the related art. The electron...

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Main Authors OHSHIMA, Takashi, OSE, Yoichi, MORISHITA, Hideo, KATANE, Junichi, HATANO, Michio, TAKAGUCHI, Katsura, AGEMURA, Toshihide
Format Patent
LanguageEnglish
Published 18.04.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:An object of the invention is to provide an electron microscope capable of obtaining a sufficient energy resolution without forming a long drift space and capable of attaining high energy discrimination detection performance with approximately the same device size as in the related art. The electron microscope according to the invention includes a pulsed electron emission mechanism configured to emit an electron beam in a pulsed manner, and discriminates energy of signal electrons by discriminating the signal electrons, which are emitted from a sample by irradiating the sample with the electron beam, according to a time of flight (see FIG. 2).
Bibliography:Application Number: US202118572544