Systems And Methods For Detecting Beam Displacement

Detectors, systems, and methods for detecting lateral beam displacement for a beam microscopy system are described herein. In one aspect, a detector can include an aperture for allowing a charged particle beam passing through the detector and irradiating a sample; and a plurality of rails arranged i...

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Bibliographic Details
Main Author McGinn, James B
Format Patent
LanguageEnglish
Published 04.04.2024
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:Detectors, systems, and methods for detecting lateral beam displacement for a beam microscopy system are described herein. In one aspect, a detector can include an aperture for allowing a charged particle beam passing through the detector and irradiating a sample; and a plurality of rails arranged in a first plane extending radially outward from the aperture, wherein each of the plurality of rails is configured to detect charged particles from the charged particle beam before irradiating the sample.
Bibliography:Application Number: US202218051170