NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES

• Main Authors: Hadar, Uri, Eilon, Michal, Girmonsky, Doron, Shemesh, Dror
• Format: Patent
• Language: English
• Published: 21.03.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

Disclosed herein is a system for non-destructive depth-profiling of samples. The system includes: (i) an electron beam (e-beam) source for projecting e-beams at each of a plurality of landing energies on an inspected sample; (ii) an electron sensor for obtaining a measured set of electron intensitie...