DOUBLE-DECKED INTERCONNECT FEATURES

An integrated circuit structure includes a first interconnect layer, and a second interconnect layer above the first interconnect layer. The first interconnect layer includes a first interconnect feature and a second interconnect feature. The second interconnect layer includes a third interconnect f...

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Bibliographic Details
Main Authors Choi, June, Mehta, Nikhil J, Ong, Clifford L, Schenker, Richard, Wallace, Charles H
Format Patent
LanguageEnglish
Published 29.02.2024
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