DIFFERENTIAL PRESSURE SENSOR FOR DETERMINING THE DIFFERENTIAL PRESSURE BETWEEN TWO PRESSURES

• Main Authors: Uehlin, Thomas, Noack, Michael, Gutmann, Florian, Beck, Alexander, Getman, Igor, Hügel, Michael, Mack, Benjamin
• Format: Patent
• Language: English
• Published: 29.02.2024
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

A differential pressure sensor for determining the differential pressure between two pressures includes a converter chamber including a differential pressure measuring cell, and a measuring unit including a main body and a coplanar double-membrane system with two double membranes, each including a separating membrane and an overload membrane with a pressure chamber between the separating membrane and the overload membrane and an additional pressure chamber between the overload membrane and the main body. Each pressure chamber and each additional pressure chamber is paired with at least one capillary connection such that in the event of an overpressure, the overpressure is hydraulically transmitted from the high-pressure side to the low-pressure side via a hydraulic fluid such that the overload membrane and the separating membrane are deflected, and the hydraulic fluid displaced from the high-pressure side to the additional pressure chamber on the low-pressure side before the overpressure reaches the pressure-sensitive element.