METHODS AND APPARATUS FOR A SUSCEPTOR LIFT TOOL

Embodiments of the present invention provide a lift tool used to facilitate moving a susceptor. The lift tool includes a plate-shaped central region, a plurality of arms connected to and extending outward from the central region, wherein each arm includes a through-hole. The lift tool also includes...

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Bibliographic Details
Main Authors Ricketts, Matthew, Bhatt, Ruchik
Format Patent
LanguageEnglish
Published 15.02.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Embodiments of the present invention provide a lift tool used to facilitate moving a susceptor. The lift tool includes a plate-shaped central region, a plurality of arms connected to and extending outward from the central region, wherein each arm includes a through-hole. The lift tool also includes a plurality of hooks extending through the through hole of a respective arm. Each hook may include a leg and a foot connected to the leg.
Bibliography:Application Number: US202318230729