METHOD FOR PRODUCING A SUBSTRATE HAVING A STRUCTURED SURFACE, AND SUBSTRATE HAVING A STRUCTURED SURFACE

In an embodiment, a method for producing a substrate having a structured surface includes providing the substrate having a substrate body and having a surface to be structured, forming an absorption layer, a first mask layer and a second mask layer on the surface to be structured, forming openings i...

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Bibliographic Details
Main Authors Lex, Andreas, Avramescu, Adrian Stefan, Walter, Robert, Herz, Martin, Taeger, Sebastian, GrassI, Christian
Format Patent
LanguageEnglish
Published 15.02.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:In an embodiment, a method for producing a substrate having a structured surface includes providing the substrate having a substrate body and having a surface to be structured, forming an absorption layer, a first mask layer and a second mask layer on the surface to be structured, forming openings in the second mask layer in which the first mask layer is exposed, exposing the surface to be structured in a region of the openings, forming depressions in the surface to be structured in the region of the openings to form the structured surface of the substrate and removing the absorption layer from the substrate.
Bibliography:Application Number: US202118266909