Mask Blank Glass Substrate
A mask blank glass substrate having a maximum value of a circularly averaged power spectral density of 1,000 nm4 or less at a spatial frequency of 0.1 μm−1 or more and 20 μm−1 or less, the maximum value being obtained by measuring a surface morphology of a region of 10 μm×10 μm with an atomic force...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
15.02.2024
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Subjects | |
Online Access | Get full text |
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Summary: | A mask blank glass substrate having a maximum value of a circularly averaged power spectral density of 1,000 nm4 or less at a spatial frequency of 0.1 μm−1 or more and 20 μm−1 or less, the maximum value being obtained by measuring a surface morphology of a region of 10 μm×10 μm with an atomic force microscope. |
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Bibliography: | Application Number: US202318495139 |