PARTICLE DETECTOR COMPRISING A POROUS REGION MADE OF A SEMICONDUCTOR MATERIAL, AND ASSOCIATED MANUFACTURING METHOD
A device for measuring a particle beam, includes front and rear faces, a first central portion including a device for forming a space charge region through which a particle beam to be measured passes, charge carriers of a first and second type being generated by the beam when the latter passes throu...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
08.02.2024
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Subjects | |
Online Access | Get full text |
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Summary: | A device for measuring a particle beam, includes front and rear faces, a first central portion including a device for forming a space charge region through which a particle beam to be measured passes, charge carriers of a first and second type being generated by the beam when the latter passes through the space charge region, a second peripheral portion including a device for collecting at least one type of charge carrier from the first or second type of charge carriers generated in the space charge region, the central portion having a maximum thickness less than or equal to that of the peripheral portion, the peripheral portion surrounding the central portion such that a particle beam can pass through the central portion without passing through the peripheral portion. The device includes, in a region of the central portion leading to the rear face, a layer of a porous material. |
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Bibliography: | Application Number: US202118259017 |