DRIVING SUBSTRATE, PREPARATION METHOD THEREOF, AND DISPLAY PANEL

A driving substrate, a preparation method thereof, and a display panel are disclosed. The driving substrate includes a base, an oxide semiconductor layer, an etch stop layer (ESL) and a water-oxygen barrier layer which are sequentially arranged. The oxide semiconductor layer includes a channel. The...

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Bibliographic Details
Main Author LUO, Chuanbao
Format Patent
LanguageEnglish
Published 25.01.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A driving substrate, a preparation method thereof, and a display panel are disclosed. The driving substrate includes a base, an oxide semiconductor layer, an etch stop layer (ESL) and a water-oxygen barrier layer which are sequentially arranged. The oxide semiconductor layer includes a channel. The ESL covers the channel. An orthographic projection of the water-oxygen barrier layer on a plane where the base is located at least partially overlaps with that of the channel on the plane where the base is located.
Bibliography:Application Number: US202117621166