GLASS DIFFRACTION GRATING AND METHOD OF PRODUCING THE SAME

A method of producing a diffraction grating of borosilicate glass or barium borosilicate glass, the method comprising the steps of forming a grating on a surface of a silicon wafer the grating through the Bosch process; forming an oxide film on a surface of the grating by heating and exposure to wat...

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Main Authors OKAMOTO, Takayuki, OKADA, Makoto, NAKAUCHI, Yusuke, NISHIMAKI, Makio, YAMAMOTO, Kazuya, SAIKI, Kazuto, SASAKI, Minoru, YAMAGATA, Yutaka, EBIZUKA, Noboru
Format Patent
LanguageEnglish
Published 04.01.2024
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:A method of producing a diffraction grating of borosilicate glass or barium borosilicate glass, the method comprising the steps of forming a grating on a surface of a silicon wafer the grating through the Bosch process; forming an oxide film on a surface of the grating by heating and exposure to water vapor of the silicon wafer; removing the oxide film using hydrofluoric acid; making the surface provided with the grating of the silicon wafer and a surface of a glass plate undergo anodic bonding; heating the silicon wafer and the glass plate bonded to each other; polishing a surface opposite to the boded surface of the silicon wafer and a surface opposite to the boded surface of the glass plate; and removing silicon from the glass plate by selective etching using xenon difluoride.
Bibliography:Application Number: US202318468120