LITHOGRAPHIC STRAIN GAUGE IN AN ELECTRICALLY CONDUCTING SUBSTRATE
An electrically conducting substrate includes a plurality of layers. A strain gauge is deposited on a layer of the plurality of layers. The strain gauge measures the stress and/or strain of the electrically conducting substrate. This allows the strain gauge to determine whether a stress or strain of...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
28.12.2023
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Subjects | |
Online Access | Get full text |
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Summary: | An electrically conducting substrate includes a plurality of layers. A strain gauge is deposited on a layer of the plurality of layers. The strain gauge measures the stress and/or strain of the electrically conducting substrate. This allows the strain gauge to determine whether a stress or strain of the electrically conducting substrate has caused the electrically conducting substrate to deform, crack, or break. |
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Bibliography: | Application Number: US202217849453 |