Spacer Stack For Magnetic Tunnel Junctions

• Main Authors: LIOU, Joung-Wei, LAN, Chin Kun
• Format: Patent
• Language: English
• Published: 21.12.2023
• Subjects: ELECTRICITY

The present disclosure describes an exemplary method that forms spacer stacks with metallic compound layers. The method includes forming magnetic tunnel junction (MTJ) structures on an interconnect layer and depositing a first spacer layer over the MTJ structures and the interconnect layer. The meth...