SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

A semiconductor device includes: a plurality of word line pad portions that are stacked over a lower structure in a direction perpendicular to a surface of the lower structure; horizontal-level dielectric layers between the word line pad portions; and bridge prevention layers disposed between the wo...

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Bibliographic Details
Main Author KIM, Seung Hwan
Format Patent
LanguageEnglish
Published 21.12.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INFORMATION STORAGE
PHYSICS
SEMICONDUCTOR DEVICES
STATIC STORES
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Summary:A semiconductor device includes: a plurality of word line pad portions that are stacked over a lower structure in a direction perpendicular to a surface of the lower structure; horizontal-level dielectric layers between the word line pad portions; and bridge prevention layers disposed between the word line pad portions and covering ends of the horizontal-level dielectric layers.
Bibliography:Application Number: US202217989125