SYSTEM AND METHOD FOR SUPPLYING AND DISPENSING BUBBLE-FREE PHOTOLITHOGRAPHY CHEMICAL SOLUTIONS
A method of supplying a chemical solution to a photolithography system. The chemical solution is pumped from a variable-volume buffer tank. The pumped chemical solution is dispensed in a spin-coater. The variable-volume buffer tank is refilled by emptying a storage container filled with the chemical...
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| Main Authors | , , , , , , |
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| Format | Patent |
| Language | English |
| Published |
30.11.2023
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A method of supplying a chemical solution to a photolithography system. The chemical solution is pumped from a variable-volume buffer tank. The pumped chemical solution is dispensed in a spin-coater. The variable-volume buffer tank is refilled by emptying a storage container filled with the chemical solution into the variable-volume buffer tank. |
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| AbstractList | A method of supplying a chemical solution to a photolithography system. The chemical solution is pumped from a variable-volume buffer tank. The pumped chemical solution is dispensed in a spin-coater. The variable-volume buffer tank is refilled by emptying a storage container filled with the chemical solution into the variable-volume buffer tank. |
| Author | Zhou, Wen-Zhan Huang, Yu-Chen Lee, Heng-Jen Hwang, Ho-Yung David Liu, Hsu-Yuan Wu, Cheng-Han Wang, Shih-Che |
| Author_xml | – fullname: Zhou, Wen-Zhan – fullname: Wu, Cheng-Han – fullname: Hwang, Ho-Yung David – fullname: Wang, Shih-Che – fullname: Huang, Yu-Chen – fullname: Lee, Heng-Jen – fullname: Liu, Hsu-Yuan |
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| Snippet | A method of supplying a chemical solution to a photolithography system. The chemical solution is pumped from a variable-volume buffer tank. The pumped chemical... |
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| SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR BOTTLES, JARS OR SIMILAR CONTAINERS CINEMATOGRAPHY DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISEPROVIDED FOR ELECTROGRAPHY HOLOGRAPHY LIQUID HANDLING MATERIALS THEREFOR OPENING, CLOSING ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TRANSPORTING |
| Title | SYSTEM AND METHOD FOR SUPPLYING AND DISPENSING BUBBLE-FREE PHOTOLITHOGRAPHY CHEMICAL SOLUTIONS |
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