Semiconductor Device and Method of Manufacturing the Same

• Main Authors: Young, Bo-Feng, Yeong, Sai-Hooi, Chui, Chi On
• Format: Patent
• Language: English
• Published: 23.11.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method includes forming a thin-film omega transistor, which includes forming a gate fin over a dielectric layer, forming a gate dielectric on sidewalls and a top surface of the gate fin, and depositing an oxide semiconductor layer over the gate dielectric. The gate fin, the gate dielectric, and th...