METHOD FOR DIVIDING A TRANSPARENT WORKPIECE

• Main Authors: BLOTHE, Markus, CHAMBONNEAU, Maxime, NOLTE, Stefan, KUMKAR, Malte
• Format: Patent
• Language: English
• Published: 23.11.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

The invention relates to a method for dividing a transparent workpiece (1) by means of pulsed laser radiation (2) by way of creating a beam convergence zone (3) in the volume of the workpiece, in which the intensity of the laser radiation (2) exceeds a threshold value for non-linear absorption, wherein the beam convergence zone (3) and the workpiece (1) are moved relative to each other, thereby creating a two-dimensional weakening in the workpiece (1) extending along a predetermined separating line (4), and wherein the workpiece (1) is subsequently divided along the separating line (4). The invention proposes that by selecting the duration of the energy input generated by the non-linear absorption of the pulsed laser radiation and by spatial beam shaping, non-linear propagation of the laser radiation (2) in the volume (1) of the workpiece outside the beam convergence zone (3) is suppressed.