COMPACT MODULAR GAS DISTRIBUTION PLUMBING AND HEATING SYSTEM FOR MULTI-STATION DEPOSITION MODULES

A gas distribution arrangement to provide gas mixtures to processing stations in a substrate processing system comprises a first and second valve inlet blocks to supply first and second precursor gas mixtures. The first valve inlet block is arranged above the processing stations and comprises a firs...

Full description

Saved in:
Bibliographic Details
Main Author BAMFORD, Thadeous
Format Patent
LanguageEnglish
Published 23.11.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:A gas distribution arrangement to provide gas mixtures to processing stations in a substrate processing system comprises a first and second valve inlet blocks to supply first and second precursor gas mixtures. The first valve inlet block is arranged above the processing stations and comprises a first housing that encloses a first plurality of valves in fluid communication with the processing stations and a first precursor gas manifold, a first co-flow gas manifold, and a first divert outlet manifold in fluid communication with the first plurality of valves. The second valve inlet block is arranged above the first valve inlet block and comprises a second housing that encloses a second plurality of valves in fluid communication with the processing stations and a second precursor gas manifold, a second co-flow gas manifold, and a second divert outlet manifold in fluid communication with the second plurality of valves.
Bibliography:Application Number: US202118027288