METHOD AND APPARATUS FOR TESTING SEMICONDUCTOR DEVICE

A method for testing a semiconductor device comprises obtaining an alignment signal between one or more auxiliary pins of a test probe and one or more auxiliary pads of a test key of the semiconductor device before a probing test of the semiconductor device. The obtaining of the alignment signal com...

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Bibliographic Details
Main Authors ZHU, Zhengpeng, YE, Benfei
Format Patent
LanguageEnglish
Published 23.11.2023
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING ELECTRIC VARIABLES
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:A method for testing a semiconductor device comprises obtaining an alignment signal between one or more auxiliary pins of a test probe and one or more auxiliary pads of a test key of the semiconductor device before a probing test of the semiconductor device. The obtaining of the alignment signal comprises: performing a vertical alignment between the one or more auxiliary pins of the test probe and the one or more auxiliary pads of the test key; and gradually reducing a vertical distance between the one or more auxiliary pins of the test probe and the one or more auxiliary pads of the test key for bringing into an electrical contact until the alignment signal there-between satisfies an alignment condition.
Bibliography:Application Number: US202217749632