AUTO FOCUS SYSTEM FOR INSPECTION OF HIGH-DENSITY PARTS

A method and apparatus to maintain image focus on parts such as wafers, circuit boards, or high-density substrates as the part is being inspected. Focus performance is independent of feature and trace orientation and density. This apparatus can be easily integrated into an inspection system and can...

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Bibliographic Details
Main Authors Bishop, Robert P, Pinkney, Timothy
Format Patent
LanguageEnglish
Published 16.11.2023
Subjects
CALCULATING
COMPUTING
COUNTING
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
PICTORIAL COMMUNICATION, e.g. TELEVISION
TESTING
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Summary:A method and apparatus to maintain image focus on parts such as wafers, circuit boards, or high-density substrates as the part is being inspected. Focus performance is independent of feature and trace orientation and density. This apparatus can be easily integrated into an inspection system and can maintain focus on parts with high aspect ratio structures and or low or non-reflective insulators. It enables the inspection of high-density fine line products requiring the use of high resolution, high numerical aperture (NA) imaging optics with small depths of focus (DOF) that must be kept in focus during the inspection.
Bibliography:Application Number: US202318135764