LASER PROCESSING MACHINE AND METHOD OF CORRECTING SPOT DIAMETER OF LASER PROCESSING MACHINE

• Main Authors: Matsuo, Ryuta, Motoyoshi, Takashi
• Format: Patent
• Language: English
• Published: 16.11.2023
• Subjects: CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

A laser processing machine includes: a lens for condensing a laser beam; an actuator changing a relative position between the lens and a workpiece to change a focal position of the laser beam with respect to the workpiece; a protective glass disposed between the lens and the workpiece; a detector detecting a focal position of the laser beam; and a controller configured to control the actuator, the controller configured to obtain a current deviation amount of the focal position from a target position using the detector, the controller configured to obtain a relationship data, wherein the relationship data indicates relationship between a deviation amount of the focal position from the target position and a spot diameter of the laser beam on a surface of the workpiece when contaminant adheres the protective glass, the controller configured to estimate a current spot diameter of the laser beam on the surface using the current deviation amount and the relationship data, the controller configured to control the actuator to correct the current spot diameter using the current deviation amount and an estimated current spot diameter.