MICOELECTRONIC DEVICES WITH PILLARS OR OPENINGS EXTENDING THROUGH A TIERED STACK

Device, systems, and structures include a stack of vertically-alternating tiers of materials arranged in one or more decks of tiers. A channel opening, in which a channel pillar may be formed, extends through the stack. The pillar includes a "shoulder portion" extending laterally into an &...

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Bibliographic Details
Main Authors Dorhout, Justin B, Hopkins, John D, Fazil, Damir, Lomeli, Nancy M
Format Patent
LanguageEnglish
Published 09.11.2023
Subjects
ELECTRICITY
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Summary:Device, systems, and structures include a stack of vertically-alternating tiers of materials arranged in one or more decks of tiers. A channel opening, in which a channel pillar may be formed, extends through the stack. The pillar includes a "shoulder portion" extending laterally into an "undercut portion" of the channel opening, which undercut portion is defined along at least a lower tier of at least one of the decks of the stack.
Bibliography:Application Number: US202318353794