ACOUSTIC WAVE DEVICE WITH WURTZITE BASED PIEZOELECTRIC LAYER

Aspects of this disclosure relate to an acoustic wave device with a piezoelectric layer that includes a wurtzite structure. The wurtzite structure can include aluminum nitride and silicon carbide. Related piezoelectric layers, acoustic wave filters, radio frequency modules, wireless communication de...

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Bibliographic Details
Main Authors Shin, Kwang Jae, Feld, David Albert, Abbott, Benjamin Paul, Shirakawa, Alexandre Augusto, Hill, Michael David, Bader, Stefan
Format Patent
LanguageEnglish
Published 02.11.2023
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Summary:Aspects of this disclosure relate to an acoustic wave device with a piezoelectric layer that includes a wurtzite structure. The wurtzite structure can include aluminum nitride and silicon carbide. Related piezoelectric layers, acoustic wave filters, radio frequency modules, wireless communication devices, and methods are disclosed.
Bibliography:Application Number: US202318193317