ACOUSTIC WAVE DEVICE WITH WURTZITE BASED PIEZOELECTRIC LAYER
Aspects of this disclosure relate to an acoustic wave device with a piezoelectric layer that includes a wurtzite structure. The wurtzite structure can include aluminum nitride and silicon carbide. Related piezoelectric layers, acoustic wave filters, radio frequency modules, wireless communication de...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
02.11.2023
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Subjects | |
Online Access | Get full text |
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Summary: | Aspects of this disclosure relate to an acoustic wave device with a piezoelectric layer that includes a wurtzite structure. The wurtzite structure can include aluminum nitride and silicon carbide. Related piezoelectric layers, acoustic wave filters, radio frequency modules, wireless communication devices, and methods are disclosed. |
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Bibliography: | Application Number: US202318193317 |