OPTICAL SCANNING DEVICE AND ABNORMALITY DETECTION METHOD
An optical scanning device of the present disclosure includes: a micromirror device including a mirror that has a reflecting surface for reflecting light and is swingable around at least one axis, and an actuator that allows the mirror to swing; a control device configured to control an operation of...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
02.11.2023
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Subjects | |
Online Access | Get full text |
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Summary: | An optical scanning device of the present disclosure includes: a micromirror device including a mirror that has a reflecting surface for reflecting light and is swingable around at least one axis, and an actuator that allows the mirror to swing; a control device configured to control an operation of the actuator; a light irradiation device configured to irradiate a back surface of the mirror on a side opposite to the reflecting surface with illumination light; a detection device to which reflected light of the illumination light that has been reflected by the mirror is incident and configured to output a position signal representing a position of the incidence light; and an abnormality detection device configured to detect an abnormal operation of the mirror based on a temporal fluctuation amount of the position signal. |
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Bibliography: | Application Number: US202318300557 |