POLISHING COMPOSITIONS AND METHODS OF USE THEREOF

This disclosure relates to polishing compositions containing at least one abrasive, at least one organic acid or a salt thereof, at least one organic solvent in an amount of from about 3% to about 50% by weight of the composition, and an aqueous solvent.

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Bibliographic Details
Main Authors Liang, Yannan, Hu, Bin, Hsien Lu, Hsin
Format Patent
LanguageEnglish
Published 02.11.2023
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Summary:This disclosure relates to polishing compositions containing at least one abrasive, at least one organic acid or a salt thereof, at least one organic solvent in an amount of from about 3% to about 50% by weight of the composition, and an aqueous solvent.
Bibliography:Application Number: US202318127053