WAFER PRODUCTION SYSTEM AND WAFER MANUFACTURING METHOD

A water production system includes a filter unit that filters water to produce clear water, an ultraviolet light irradiator that irradiates, with ultraviolet light, the clear water produced by the filter unit, thereby degrading organic matter in the clear water, an ion exchange resin unit that purif...

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Bibliographic Details
Main Author HIRATA, Kazuya
Format Patent
LanguageEnglish
Published 19.10.2023
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Summary:A water production system includes a filter unit that filters water to produce clear water, an ultraviolet light irradiator that irradiates, with ultraviolet light, the clear water produced by the filter unit, thereby degrading organic matter in the clear water, an ion exchange resin unit that purifies the clear water, in which the organic matter has been degraded by the ultraviolet light irradiator, into pure water, and a deaerated water production unit that deaerates the pure water to produce deaerated water.
Bibliography:Application Number: US202318296437