OXIDE INSULATOR FILM, ELECTRONIC DEVICE AND METHOD FOR PRODUCING ELECTRONIC DEVICE

An oxide insulator film contains a first metal oxide and a second metal oxide. An electrical conductivity of the second metal oxide is lower than an electrical conductivity of the first metal oxide. The oxide insulator film includes particles of the first metal oxide which are dispersed in a matrix...

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Bibliographic Details
Main Authors NAGASAKI, Yoshihisa, TAGUCHI, Seiji, TAKIZAWA, Toshiyuki, SASAKI, Takashi
Format Patent
LanguageEnglish
Published 12.10.2023
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Summary:An oxide insulator film contains a first metal oxide and a second metal oxide. An electrical conductivity of the second metal oxide is lower than an electrical conductivity of the first metal oxide. The oxide insulator film includes particles of the first metal oxide which are dispersed in a matrix including the second metal oxide.
Bibliography:Application Number: US202118043510