OXIDE INSULATOR FILM, ELECTRONIC DEVICE AND METHOD FOR PRODUCING ELECTRONIC DEVICE
An oxide insulator film contains a first metal oxide and a second metal oxide. An electrical conductivity of the second metal oxide is lower than an electrical conductivity of the first metal oxide. The oxide insulator film includes particles of the first metal oxide which are dispersed in a matrix...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
12.10.2023
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Subjects | |
Online Access | Get full text |
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Summary: | An oxide insulator film contains a first metal oxide and a second metal oxide. An electrical conductivity of the second metal oxide is lower than an electrical conductivity of the first metal oxide. The oxide insulator film includes particles of the first metal oxide which are dispersed in a matrix including the second metal oxide. |
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Bibliography: | Application Number: US202118043510 |