FULLY SOFT SELF-POWERED VIBRATION SENSOR AND ITS FABRICATION METHOD

• Main Authors: Dong, Zheyu, Ye, Jiachen, Xu, Kaichen, Zhao, Haonan, Yang, Geng, Luo, Huayu, Yang, Huayong
• Format: Patent
• Language: English
• Published: 28.09.2023
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; MACHINE TOOLS; MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES; MEASURING; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PHYSICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; SOLDERING OR UNSOLDERING; TESTING; TRANSPORTING; WELDING; WORKING BY LASER BEAM; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

A method for preparing a fully soft self-powered vibration sensor mainly uses a laser carbonization technology to prepare a two-dimensional porous carbon electrode with an origami structure, and then transfers the two-dimensional porous carbon electrode to a three-dimensional polydimethylsiloxane (PDMS) cavity through mold transfer; Finally, a laser engraving technology is used to create microstructures on surfaces of the porous carbon electrode and a PDMS film. The sensor includes the PDMS film, a liquid metal droplet oscillator, a porous out-of-plane carbon electrode, and a 3D PDMS cavity assembled tightly from top to bottom. The sensor works based on the triboelectric nanogenerator principle, when the sensor is excited by vibrations, contact and triboelectrification at an interface of the liquid metal droplet oscillator and PDMS film charge both objects, making contact surfaces carry stable charges, which allows the movement of the liquid metal droplet oscillator to output current through electrostatic induction.