MEMORY DEVICE

A memory device includes a substrate, a three-dimensional (3D) NAND memory cell array on the substrate, and a peripheral circuit including a transistor on the substrate. The substrate includes p-type impurities and n-type impurities, a concentration of the n-type impurities in the substrate is lower...

Full description

Saved in:
Bibliographic Details
Main Authors Choi, Samjong, Kim, Yehwan, Baek, Gayeong, Im, Hwon, Kim, Yeonsook, Kim, Euido, Kim, Cheongjun, Lee, Munkeun
Format Patent
LanguageEnglish
Published 21.09.2023
Subjects
Online AccessGet full text

Cover

Loading…