MEMORY DEVICE
A memory device includes a substrate, a three-dimensional (3D) NAND memory cell array on the substrate, and a peripheral circuit including a transistor on the substrate. The substrate includes p-type impurities and n-type impurities, a concentration of the n-type impurities in the substrate is lower...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English |
Published |
21.09.2023
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Subjects | |
Online Access | Get full text |
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