ETCHANT

An etchant including: persulfate; a fluorine-containing compound; a chlorine-containing compound; a cyclic amine compound; an inorganic acid; sulfate; and water, wherein a tip control index (Y) of the etchant is a value of at least about 45.0 and not more than about 70.0, the tip control index (Y) b...

Full description

Saved in:
Bibliographic Details
Main Authors Kim, Yujin, Cho, Hyeonsu, Kim, Jeehoon, Yoon, Youngjin, Lee, Eunwon, Kang, Donghan, Yang, Shinhyuk, Kim, Beomsoo
Format Patent
LanguageEnglish
Published 21.09.2023
Subjects
ADHESIVES
CHEMISTRY
DYES
MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE
METALLURGY
MISCELLANEOUS APPLICATIONS OF MATERIALS
MISCELLANEOUS COMPOSITIONS
NATURAL RESINS
PAINTS
POLISHES
Online AccessGet full text

Cover

More Information
Summary:An etchant including: persulfate; a fluorine-containing compound; a chlorine-containing compound; a cyclic amine compound; an inorganic acid; sulfate; and water, wherein a tip control index (Y) of the etchant is a value of at least about 45.0 and not more than about 70.0, the tip control index (Y) being a value calculated by Equation 1:Y=1.0×10−3×M(X1)+1.0×10−1×M(X2)+5.0×10−2×M(X3)+1.5×M(X1)×M(X2)+2.0×10−1×M(X1)×M(X3)+2.0×10−1×M(X2)×M(X3)  Equation 1The description of Equation 1 is as in the specification.
Bibliography:Application Number: US202318169798